Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine
نویسندگان
چکیده
منابع مشابه
Precision absolute positional measurement of laser beams.
We describe an instrument which, coupled with a suitable coordinate measuring machine, facilitates the absolute measurement within the machine frame of the propagation direction of a millimeter-scale laser beam to an accuracy of around ±4 μm in position and ±20 μrad in angle.
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ژورنال
عنوان ژورنال: IEEE Access
سال: 2019
ISSN: 2169-3536
DOI: 10.1109/access.2019.2934829